| 摘要 |
FIELD: process engineering.SUBSTANCE: invention relates to laser spraying of superconducting ultrathin films of complex metal oxide compound like YBaCuOby optimisation of parameters of laser radiation and postgrowth annealing in spraying chamber. It allows the production of ultrathin superconducting 12-25 nm deep films with surface irregularity of 1-2 nm. In compliance with this method, ceramic target YBaCuOis subjected to dense laser radiation of 3·10÷5·10W/cm, power and 1.06 mcm wavelength, pulse duration of 10-20 ns and pulse repetition rate of 10 Hz for 15÷30 s at 50÷100 Pa. Note here that target temperature makes 600÷700°C, substrate temperature equals 800-840°C. Superconducting 12-25 nm deep film results. Thereafter, at 840-780°C film is annealed at cooling rate of 4°C/min, at 780-700°C - at cooling rate of 10°C/min, at 700-400°C - at cooling rate of 15°C/min, at 400-20°C - at cooling rate of 19°C/min.EFFECT: laser spraying of superconducting ultrathin films of complex metal oxide compound.2 dwg |
