plasma reactor able to sense damaged inner passivation layer and control method thereof

摘要

PURPOSE: A plasma reactor is provided to prevent the deterioration of plasma generation due to the damage to an internal protective layer by sensing the damage to the internal protective layer through a protective film damage sensor. CONSTITUTION: A conductivity reactor body(12) provides a plasma discharge area. An inner protection film is formed in the conductivity reactor body. A leakage current detection unit(40) detects the leakage current, from the plasma formed in the plasma discharge area, from the reactor body. The protective film damage sensor(42) senses the damage to the inner protection film of the reactor body based on the leakage current detected through the leakage current detection unit.