发明名称 NEGATIVE PHOTOSENSITIVE RESIN COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a negative photosensitive resin composition containing a polyamic acid, which gives a polyimide resin that can be favorably patterned by a photolithography method and has excellent heat resistance, and to provide a method for producing a patterned polyimide resin film using the composition, a flexible film having the polyimide resin film obtained by the production method, and a flexible substrate including the film.SOLUTION: The negative photosensitive resin composition comprises: (A) a polyamic acid having a mass average molecular weight of 4000 to 60000 and a dispersion degree of 3.5 or less; (B) a compound that generates an acid or a base by an action of light; and (C) N,N,N',N'-tetramethylurea. The method for producing a patterned polyimide resin film includes: a coating film forming step of forming a coating film of the composition; an exposure step of selectively exposing the coating film; a developing step of developing the coating film after exposed; and a heating step of heating the coating film after developed.
申请公布号 JP2015014705(A) 申请公布日期 2015.01.22
申请号 JP20130141351 申请日期 2013.07.05
申请人 TOKYO OHKA KOGYO CO LTD 发明人 NODA KUNIHIRO;CHISAKA HIROKI;SHIODA MASARU
分类号 G03F7/038;G03F7/004;G03F7/40;H05K3/28 主分类号 G03F7/038
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