SEMICONDUCTOR DEVICE, AND METHOD OF DETECTING PROBE POSITION RELATIVE TO INSPECTING PAD OF SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor device which enables detection of a probe position relative to an inspecting pad.SOLUTION: A semiconductor device includes an inspecting pad 11 which has four sides for inputting/outputting electric signal to/from a circuit element, a first displacement detection pad P1 which is arranged to face four sides, a second displacement detection pad P2, a third displacement detection pad P3, a fourth displacement detection pad P4, a first resistor connected to the first displacement detection pad P1, a second resistor connected to the second displacement detection pad P2, a third resistor connected to the third displacement detection pad P3, a fourth resistor connected to the fourth displacement detection pad P4, and a monitor pad M connected to the first resistor, the second resistor, the third resistor, and the fourth resistor.