COVER FASTENING APPARATUS AND TRANSFERRING APPARATUS HAVING THE SAME FOR SUBSTRATE

摘要

The present invention relates to a cover coupling apparatus for a substrate transferring apparatus. To couple a cover apparatus, which blocks foreign matters generated from a driving apparatus to move a second arm unit in the transfer direction of a substrate, to a first arm unit, according to the present invention, a cover coupling apparatus for a substrate transferring apparatus comprises: a coupling main body coupled to the first arm unit; a fastening hole formed in the coupling main body, and having a coupling member fastened thereto and used to couple the cover apparatus; and a through-hole connected to the fastening hole by being formed to penetrate the coupling main body. According to the present invention, the cover coupling apparatus for a substrate transferring is capable of being manufactured easily by being manufactured separately from the first arm unit. In addition, according to the present invention, the cover coupling apparatus for a substrate transferring allows the cover apparatus to be easily fastened to the first arm unit and can reinforce a coupling force between the cover apparatus and the first arm unit.