ELECTRONIC FUSE LINE WITH MODIFIED CAP

摘要

An electronic fuse structure having an Mx level including an Mx dielectric, a fuse line, an Mx cap dielectric above at least a portion of the Mx dielectric, and a modified portion of the Mx cap dielectric directly above at least a portion of the fuse line, where the modified portion of the Mx cap dielectric is chemically different from the remainder of the Mx cap dielectric, an Mx+1 level including an Mx+1 dielectric, a first Mx+1 metal, an Mx+1 cap dielectric above of the Mx+1 dielectric and the first Mx+1 metal, where the Mx+1 level is above the Mx level, and a first via electrically connecting the fuse line to the first Mx+1 metal.

主权项

1. An electronic fuse structure, the structure comprising:
an Mx level comprising an Mx dielectric, a fuse line, an Mx cap dielectric above at least a portion of the Mx dielectric, and a modified portion of the Mx cap dielectric directly above at least a portion of the fuse line, wherein the modified portion of the Mx cap dielectric is chemically different from the remainder of the Mx cap dielectric; an Mx+1 level comprising an Mx+1 dielectric, a first Mx+1 metal, an Mx+1 cap dielectric above of the Mx+1 dielectric and the first Mx+1 metal, wherein the Mx+1 level is above the Mx level; and a first via electrically connecting the fuse line to the first Mx+1 metal.