发明名称 |
NON-SYMMETRIC ARRAYS OF MEMS DIGITAL VARIABLE CAPACITOR WITH UNIFORM OPERATING CHARACTERISTICS |
摘要 |
The present invention generally relates to a MEMS DVC. The MEMS DVC has an RF electrode and is formed above a CMOS substrate. To reduce noise in the RF signal, a poly-resistor that is connected between a waveform controller and the electrodes of the MEMS element, may be surrounded by an isolated p-well or an isolated n-well. The isolated well is coupled to an RF ground shield that is disposed between the poly-resistor and the MEMS element. Due to the presence of the isolated well that surrounds the poly-resistor, the substrate resistance does not influence the dynamic behavior of each MEMS element in the MEMS DVC and noise in the RF signal is reduced. |
申请公布号 |
WO2015009360(A1) |
申请公布日期 |
2015.01.22 |
申请号 |
WO2014US40235 |
申请日期 |
2014.05.30 |
申请人 |
CAVENDISH KINETICS, INC |
发明人 |
VAN KAMPEN, ROBERTUS PETRUS |
分类号 |
B81B3/00;H01G5/16;H01G5/38;H01H59/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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