| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a bending vibration piece in which Q-value is increased, a vibrator having the bending vibration piece, and an oscillator having the bending vibration piece.SOLUTION: In a bending vibration piece, a crystal vibration piece 1 comprises a base portion 11 and a pair of vibration arms 12, 13 extending from the base portion 11. The vibration arms 12, 13 have respective groove portions 18 which are formed on respective principal surfaces 10a, 10b facing each other and along a longitudinal direction of the vibration arms 12, 13. Slope portions 19 are provided in connection portions between the vibration arms 12, 13 and the base portion 11, respectively. The slope portions 19 are each formed such that, in the plan view, a width between the groove portion 18 and an outline of the slope portions 19 becomes wider in a direction from each of the vibration arms 12, 13 to the base portion 11. The groove portions 18 has an electrode-free region, where excitation electrodes 20, 21 are not formed, provided at least on a part of a bottom portion 18c corresponding to the slope portion 19 within a range between a connection portion 18d where the bottom portion 18c connects with a first side surface 18a along a longitudinal direction of the groove portion 18 and a connection portion 18e where the bottom portion 18c connects with a second side surface 18b opposing to the first side surface 18a disposing the bottom portion 18c in-between.</p> |
