发明名称 窒化アルミニウム結晶の製造方法
摘要 <p>Provided is a method for producing inexpensive and high-quality aluminum nitride crystals. Gas containing N atoms is introduced into a melt of a Ga-Al alloy 4, whereby aluminum nitride crystals are made to epitaxially grow on a seed crystal substrate 3 in the melt of the Ga-Al alloy 4. A growth temperature of aluminum nitride crystals is set at not less than 1000 degrees C and not more than 1500 degrees C, thereby allowing GaN to be decomposed into Ga metal and nitrogen gas.</p>
申请公布号 JP5656697(B2) 申请公布日期 2015.01.21
申请号 JP20110050415 申请日期 2011.03.08
申请人 发明人
分类号 C30B29/38;C30B19/04 主分类号 C30B29/38
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