| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To use two kinds of stock solution tanks storing abrasive liquids with different mixing ratios with a diluting fluid from each other in an abrasive liquid supply device without requiring a changing operation of a setting value of the mixing ratio in the abrasive liquid supply device. <P>SOLUTION: The abrasive liquid supply device 10 includes: a stock solution supply part 12 for supplying an abrasive liquid stock solution from a stock solution tank T to a mixing tank 11; a diluting fluid supply part 13 for supplying the diluting fluid to the mixing tank 11 through a diluting fluid flow passage 13a; and a control part 15 for controlling the stock solution supply part 12 and the diluting fluid supply part 13 so that an abrasive liquid generated by mixing the abrasive liquid stock solution and the diluting fluid at a prescribed ratio is generated in the mixing tank. A mixing ratio control device 30 includes: a discharge part 31 for discharging the diluting fluid flowing in the diluting fluid flow passage 13a at the upstream side of the mixing tank 11; and a discharge control part 32 for controlling the discharge part 31 so that when a prescribed kind of the stock solution tank is used, and when the control is performed, the abrasive liquid stock solution and the diluting fluid are mixed at a ratio different from the prescribed ratio. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
