发明名称 透過電子顕微鏡、および視野ずれ補正方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a transmission electron microscope in which a transmission image of a sample is displayed on a display in real time, and visual field deviation by sample drift is automatically corrected. <P>SOLUTION: A computer to control the transmission electron microscope includes at least two memories for image processing in order to calculate movement of a transmission image position other than an image memory for display in order to display the transmission image of the sample on the display, and an arithmetic unit which calculates the movement of the transmission image position from the images retained in the memories for image processing and transmits a correction signal to a visual field correction device for correcting the visual field deviation by changing the sample position. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5656444(B2) 申请公布日期 2015.01.21
申请号 JP20100099358 申请日期 2010.04.23
申请人 发明人
分类号 H01J37/22;H01J37/26 主分类号 H01J37/22
代理机构 代理人
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