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经营范围
发明名称
SILICON WAFER
摘要
申请公布号
JPH0442893(A)
申请公布日期
1992.02.13
申请号
JP19900149595
申请日期
1990.06.07
申请人
MITSUBISHI MATERIALS CORP;JAPAN SILICON CO LTD
发明人
MORITA ETSURO;KISHIMOTO MIKIO;TATSUTA JIRO;SHIMANUKI YASUSHI;TANAKA TOSHIRO
分类号
C30B29/06;H01L21/208
主分类号
C30B29/06
代理机构
代理人
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地址
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