MANUFACTURING METHOD OF ORGANIC ELECTROLUMINESCENT DISPLAY
摘要
<p>A method of manufacturing an organic electroluminescent display according to the present invention is as follows. A color filter is formed on a TFT substrate. An organic planarization layer is formed on the color filter. A vacuum thermal process is performed on the color filter and the organic planarization layer. A first electrode is formed on the organic planarization layer. An organic light emitting member is formed on the first electrode. A second electrode is formed on the organic light emitting member. The vacuum thermal process is performed under a pressure of 10^-3 torr or less and at a temperature of 150°C to 300°C. The vacuum thermal process is performed before the organic light emitting member is formed.</p>