METHOD FOR FORMING A MASK PATTERN USING A LASER

摘要

Provided is a method for forming a pattern on a mask sheet by using a laser beam. According to the present invention, the method for forming the pattern on the mask sheet by using the laser beam comprises steps of: identifying a correction scan line of the laser beam to form a pattern along a target scan line on which the mask sheet has to be formed in a state where the mask sheet is completely manufactured; applying a reaction force to the mask sheet; fixing the mask sheet to a mask frame; and scanning the laser beam along the correction scan line; and releasing the reaction force applied to the extending mask sheet in the state where the mask sheet is fixed to the mask frame.