| 发明名称 |
COATING LIQUID FOR FORMING METAL OXIDE THIN FILM, METAL OXIDE THIN FILM, FIELD EFFECT TRANSISTOR, AND METHOD FOR PRODUCING THE FIELD EFFECT TRANSISTOR |
| 摘要 |
A coating liquid for forming a metal oxide thin film, the coating liquid including: an inorganic indium compound; at least one of an inorganic magnesium compound and an inorganic zinc compound; and a glycol ether. |
| 申请公布号 |
KR20150007358(A) |
申请公布日期 |
2015.01.20 |
| 申请号 |
KR20147036608 |
申请日期 |
2011.11.22 |
| 申请人 |
RICOH CO., LTD. |
发明人 |
NAKAMURA YUKI;UEDA NAOYUKI;ABE YUKIKO;SONE YUJI |
| 分类号 |
H01L21/02;H01L21/368;H01L29/786 |
主分类号 |
H01L21/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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