发明名称 |
Optical device formed on a substrate with thermal isolation regions formed therein |
摘要 |
An optical device that is a waveguide with a heating element thereon that is formed on a silicon substrate is disclosed. The waveguide is formed on a region of porous silicon formed in the silicon substrate. The porous silicon region provides greater resistance to the flow of heat than the silicon substrate on which the device is formed. Optionally, the porous silicon region also provides greater resistance to the flow of heat than the waveguide.
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申请公布号 |
US6370307(B1) |
申请公布日期 |
2002.04.09 |
申请号 |
US19990354406 |
申请日期 |
1999.07.15 |
申请人 |
AGERE SYSTEMS GUARDIAN CORP. |
发明人 |
BRUCE ALLAN JAMES;GLEBOV ALEXEI;SHMULOVICH JOSEPH;XIE YA-HONG |
分类号 |
G02B6/12;G02F1/01;G02F1/313;(IPC1-7):G02B6/10 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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