Method for manufacturing optical waveguide and optical waveguide manufactured by the method

摘要

The present invention relates to a production process for an optical waveguide comprising a step for forming a photosensitive resin layer comprising a photosensitive resin composition on a substrate, a step for exposing a desired pattern and a step for carrying out development in an alkaline developer containing a divalent or higher-valent metal ion and a production process for an optical waveguide comprising a step for forming a photosensitive resin layer comprising a photosensitive resin composition on a substrate, a step for exposing a desired pattern, a step for carrying out development in an alkaline developer and a step for carrying out washing with a cleaning liquid containing a divalent or higher-valent metal ion or an acid aqueous solution.;Capable of being provided are a production process for an optical waveguide which is excellent in a transparency and a reliability and an optical waveguide produced by the above production process.

主权项

1. A production process for an optical waveguide comprising a step for forming a photosensitive resin layer comprising a photosensitive resin composition on a substrate, a step for exposing a desired pattern and a step for carrying out development in an alkaline developer containing a divalent or higher-valent metal ion,
wherein the photosensitive resin composition is a resin composition comprising (A) a carboxyl group-containing alkali-soluble polymer, (B) a polymerizable compound and (C) a photopolymerization initiator, the carboxyl group-containing alkali-soluble polymer (A) being a carboxyl group-containing alkali-soluble (meth)acryl polymer.