| 摘要 |
PROBLEM TO BE SOLVED: To allow for measurement of a measurement object with an inexpensive and simple configuration.SOLUTION: Since a metal thin film filter includes a narrow band illumination optical system having a light source, and a periodic fine structure pattern shorter than a wavelength detected by a solid state image sensor, where a plurality of pixels are arranged in array, and provided on an optical path between the solid state image sensor having a sensitivity in a predetermined wavelength region, a measurement object can be measured with an inexpensive and simple configuration. The technique is applicable to an imaging device for measuring a measurement object. |
