METHOD FOR MANUFACTURING ELECTROMECHANICAL CONVERSION ELEMENT, ELECTROMECHANICAL CONVERSION ELEMENT, DROPLET DISCHARGE HEAD, AND DROPLET DISCHARGE DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce variations in polarization characteristics of an electromechanical conversion element while improving manufacturing efficiency, and to prevent occurrence of a crack and depolarization after polarization processing.SOLUTION: A method for manufacturing an electromechanical conversion element comprises the steps of: forming a first drive electrode 33 on a substrate 31 or a base film 32; forming an electromechanical conversion film 34 on the first drive electrode 33; forming a second drive electrode 35 on the electromechanical conversion film 34; forming a first insulation protective film 41 on the second drive electrode 35; forming a wiring 43 electrically connected to the second drive electrode 35 on the first insulation protective film 41; forming a second insulation protective film 44 by exposing a pad 47 for an individual electrode and an electrode 51 for aging processing; polarizing the electromechanical conversion film 34 by injecting the electric charge generated by discharge into the electrode 51 for aging processing.