| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method which prevents the problem of a short circuit between upper layer conductors, which is caused by a conductive material penetrating into a void of an insulation film which isolates twin plugs formed by division of one plug.SOLUTION: In an isolation process of twin plugs composed of a first conductive material 20B, by forming a bowing-shaped trench 20T with a lateral face wider than an opening, from which the first conductive material is separated and filling the trench 20T with a coating film 23 and subsequently etching back the whole to not greater than the maximum width of the bowing shape, and filling an isolation insulation film between the twin plugs after removing the coating film 23, the occurrence of a void in the isolation insulation film can be prevented.</p> |
