| 摘要 |
PROBLEM TO BE SOLVED: To perform a highly accurate leakage check while reducing a time required for the leakage check.SOLUTION: Provided is a leakage check method characterized in that the leakage check method includes the steps of: exhausting the interior of a treatment container; supplying nitrogen Nand oxygen Oto the inside of the treatment container after the termination of the step of exhausting; measuring a total pressure and a water partial pressure in the inside of the treatment container after the termination of the step of supplying nitrogen Nand oxygen O; and inspecting a leakage rate of the treatment container on the basis of a value of the measured total pressure from which the water partial pressure is excluded. |
