发明名称 |
ULTRASONIC SENSOR MICROARRAY AND METHOD OF MANUFACTURING SAME |
摘要 |
A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The transducers include silicon device and backing layers joined by a fused benzocyclobutene (BCB) layer which defines the transducer air gap, and which are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a matrix and are activatable to emit and receive reflected beam signals at a frequency of between about 100 to 170 kHz. |
申请公布号 |
CA2856917(A1) |
申请公布日期 |
2015.01.19 |
申请号 |
CA20142856917 |
申请日期 |
2014.07.15 |
申请人 |
UNIVERSITY OF WINDSOR |
发明人 |
CHOWDHURY, SAZZADUR;BAKHTAZAD, AREF |
分类号 |
B81C1/00;B60Q9/00;B60R1/08;B81B7/04;H04R19/00 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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