发明名称 |
ASSEMBLAGGIO DI UN DISPOSITIVO SENSORE AMBIENTALE MEMS AVENTE MIGLIORATA RESISTENZA, E RELATIVO PROCEDIMENTO DI FABBRICAZIONE |
摘要 |
Described herein is an assembly for a MEMS sensor device, which envisages: a first body made of semiconductor material, integrating a micromechanical detection structure at a first main face thereof; a cap element, set stacked on the first main face of the first body, above the micromechanical detection structure; and an adhesion structure set between the first body and the cap element, defining a gap in a position corresponding to the micromechanical detection structure. At least one first opening is defined through the adhesion structure in fluidic communication with the gap. |
申请公布号 |
ITTO20130595(A1) |
申请公布日期 |
2015.01.16 |
申请号 |
IT2013TO00595 |
申请日期 |
2013.07.15 |
申请人 |
STMICROELECTRONICS (ROUSSET) SAS;STMICROELECTRONICS INTERNATIONAL, N .V. |
发明人 |
CASTOLDI LAURA MARIA;FARALLI DINO;VIGNA BENEDETTO |
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