发明名称 MASK FOR DEPOSITION
摘要 Provided is a deposition mask to reduce deposition error. For examples, a deposition mask includes deposition pattern parts which are separated from each other in a first direction and includes pattern openings; dummy pattern parts which are arranged at both sides of each deposition pattern part in the first direction and include grooves; and fixing parts which are arranged in the outside of the outermost dummy pattern part among the dummy pattern part in the first direction. The maximum thickness of each dummy pattern part is greater than the maximum thickness of the deposition pattern part and is less than the maximum thickness of each fixing part.
申请公布号 KR20150006255(A) 申请公布日期 2015.01.16
申请号 KR20130079827 申请日期 2013.07.08
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 LEE, SANG YUN
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
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