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发明名称
可微调整制程参数之溅镀制程控制系统及其方法
摘要
本发明提供一种可微调整制程参数之溅镀制程控制系统及其方法,溅镀制程控制系统利用一类神经模糊控制法则微调整至少一制程参数,类神经模糊控制法则本身具有学能力,因此无须额外建置资料库,有效节省建置设备之成本,也节省对资料库进行搜寻与资料统计运算之时间,有效加快溅镀制程控制系统之反应时间及调校制程参数之效率。
申请公布号
TW201502302
申请公布日期
2015.01.16
申请号
TW102125164
申请日期
2013.07.15
申请人
财团法人金属工业研究发展中心
发明人
杨思华;谢余松;李宗信
分类号
C23C14/54(2006.01);G06N3/02(2006.01);G06N7/02(2006.01)
主分类号
C23C14/54(2006.01)
代理机构
代理人
蔡秀玫
主权项
地址
高雄市楠梓区高楠公路1001号
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