| 摘要 |
一种蒸发沈积设备包含蒸发部、分配部、介电部、感应线圈与交流电源。蒸发部透过连接路径提供蒸发材料。分配部包含复数个孔洞以及透过这些孔洞注入蒸发材料到真空容器内。介电部被装设于真空容器的开口的邻近以及被放置为从真空容器突出且覆盖蒸发部与分配部。感应线圈覆盖蒸发部与分配部以及感应加热蒸发部与分配部。交流电源供应交流电到感应线圈。; a distribution part having a plurality of holes and injecting the evaporation material into a vacuum container through the holes; a dielectric part mounted in the vicinity of an opening of the vacuum container and disposed to protrude from the vacuum container and to cover the evaporation part and the distribution part; an induction coil covering the distribution part and the distribution part and inductively heating the evaporation part and the distribution part; and an alternating current (AC) power source supplying AC to the induction coil. |
