SAMPLE HOLDER AND CHARGED PARTICLE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a sample holder which is enhanced in support rigidity in the direction of a second axis of a sample block in order to reduce oscillation in the direction of the second axis of the sample block.SOLUTION: Disclosed is a sample holder having a sample block for holding a sample and a frame body for supporting the sample block with a rotary shaft. An elastic body is arranged between the frame body and the sample block and the sample block is pressed with respect to the frame body.