| 摘要 |
PROBLEM TO BE SOLVED: To find conditions under which drilling is performed to a glass substrate by using only a high output carbonic acid gas laser that is considered impossible to do in the past.SOLUTION: A laser processing device includes: an X-Y table (51) on which a work-piece (50) is placed, the X-Y table which may be driven in X and Y directions; a carbon dioxide gas laser oscillator (8); a modulator (21) which modulates a laser (9) emitted from the laser oscillator (8) into a fast speed laser to make the laser into a pulse laser (9k); and an optical system which condenses the pulse laser on the work-piece (50). In order to achieve the above object, the laser processing device is used in a state where the power density of the pulse laser, the pulse period, the pulse width, and the total pulse number are respectively set to 7 MW/cm, 3 to 5 μs, 2 μs, and 20 to 21. |
