摘要 |
PROBLEM TO BE SOLVED: To correct the influence of parasitic capacitance present on a sense line and more accurately estimate a capacitance value.SOLUTION: Values of K capacitances (C1,1 to C2,18) are estimated by inner product operation between an addition-subtraction signal and N K-dimensional vectors, the addition-subtraction signal being obtained by performing addition-subtraction on a linear sum signal for driving the K capacitances in parallel by the N K-dimensional vectors, and the other linear sum signal for driving P capacitances (1≤P≤K) out of the K capacitances by N P-dimensional vectors. |