METHOD AND APPARATUS FOR EX-SITU SEASONING OF COMPONENT FOR ELECTRONIC DEVICE MANUFACTURING/PROCESSING

摘要

PROBLEM TO BE SOLVED: To provide a system for reducing a time during which an electronic device manufacturing system interrupts the operation thereof for maintenance, and improving the performance of an electronic device manufacturing facility.SOLUTION: A method includes a step for reducing operation downtime of an electronic device manufacturing system by reducing the number of seasoning steps for an electronic device manufacturing component, the seasoning steps being performed using a production device in order to improve the performance of an electronic device manufacturing facility. The method for seasoning components of the electronic device manufacturing system is performed by ex-situ seasoning.