METHOD AND SYSTEM TO REDUCE OUTGASSING IN A REACTION CHAMBER

摘要

Systems and methods of reducing outgassing of a substance within a reaction chamber of a reactor are disclosed. Exemplary methods include depositing a barrier layer within the reaction chamber and using a scavenging precursor to react with species on a surface of the reaction chamber. Exemplary systems include gas-phase deposition systems, such as atomic layer deposition systems, which include a barrier layer source and/or a scavenging precursor source fluidly coupled to a reaction chamber of the system.

主权项

1. A method of reducing outgassing of a substance, the method comprising the steps of:
providing a gas-phase reactor having a reaction chamber; forming a barrier layer on a surface of the reaction chamber to mitigate outgassing of one or more gasses; depositing material onto a surface of a substrate within the reaction chamber; and removing the substrate from the reaction chamber.