CONVEYING DEVICE, CONVEYING METHOD, EXPOSING DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To deliver and receive a substrate without generating placement shift or deformation.SOLUTION: A conveying device includes: a first support part which supplies gas to one surface of a substrate and is capable of supporting floating of the substrate via gas; a second support part capable of supporting one surface of the substrate; a drive part which moves at least one of the first and second support parts and brings the first and second support parts close to or into contact with each other to be arranged in a first direction; and a transfer part which moves the substrate supported by one of the first and second support parts arranged by the drive part to the other side in the first direction.