TEMPLATE CREATION APPARATUS FOR SAMPLE OBSERVATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a template creation apparatus for a sample observation device for assisting in automation by a recipe file.SOLUTION: The present invention directs a template creation apparatus for a sample observation device for scanning a charged particle beam on a sample and acquiring a picked-up image of the sample. The template creation device includes: a storage unit storing therein recipe file information including parameter information used when the sample observation device observes the sample and a first template image, and a plurality of picked-up images acquired from the sample observation device; and an arithmetic processing unit selecting images for template creation from among the picked-up images, and creating a second template image obtained by averaging the template creation images.