发明名称 |
TEMPERATURE DETECTION TOOL |
摘要 |
<p>A temperature detection tool is provided that is capable of reliably detecting the temperature of an object under measurement in a vacuum device without requiring the use of expensive vacuum-resistant components. A temperature detection tool (A) used to detect the temperature of an object under measurement inside a vacuum device is provided with a thermocouple unit (11) for acquiring temperature data for the object under measurement (work; 5), a logger unit (12) for accumulating the temperature data acquired by the thermocouple unit, a hermetic connecting wire (13) connecting the thermocouple unit and the logger unit, and a logger accommodation chamber (14) that accommodates the logger unit and is kept at atmospheric pressure. Additionally, a cover member (15) that is disposed so as to cover the logger accommodation chamber is provided. Further, a battery pack having batteries accommodated in a battery accommodation chamber is provided. In addition, a wireless communication unit pack having a wireless communication unit accommodated in a wireless communication unit accommodation chamber is provided.</p> |
申请公布号 |
WO2015005093(A1) |
申请公布日期 |
2015.01.15 |
申请号 |
WO2014JP66333 |
申请日期 |
2014.06.19 |
申请人 |
MURATA MANUFACTURING CO.,LTD. |
发明人 |
ADACHI, NAOYA;YAMANE, SHIGEKI |
分类号 |
G01K1/02;G01K1/14;H01L21/66 |
主分类号 |
G01K1/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|