| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric film actuator increasing a displacement amount of a diaphragm even if it has a simple structure and the same drive voltage, and also to provide: a droplet jetting device providing a displacement amount required for jetting a liquid and stably jetting liquid droplets by using the piezoelectric film actuator even if a pressure chamber is miniaturized; and methods for manufacturing the actuator and the device. <P>SOLUTION: The piezoelectric film actuator has a structure in which a flow pathway structure including the pressure chamber 17 is formed inside a stainless substrate 10; and a diffusion preventing layer 15, a piezoelectric inactive layer 14, a lower electrode 13, a piezoelectric active layer 12, and an upper electrode 11, are sequentially stacked on the upper part of the pressure chamber 17. Liquid droplets are jetted by applying a pressure to a liquid in the pressure chamber 17, via the vibration above the pressure chamber 17, generated by the voltage applied between the lower electrode 13 and the upper electrode 11. <P>COPYRIGHT: (C)2011,JPO&INPIT |
