| 摘要 |
metallurgy. SUBSTANCE: invention relates to cleaning of waste gases, in particular, gaseous wastes of CVD processes, plasma etching or like processes with at least one zone of combustion with vertical arrangement inside outer tube which is limited from top by dome-like casing, and inside-mixing or outside- mixing burner whose fuel gas, oxygen or air and waste gases are fed to burner, Device is furnished also with oxidizing agent and/or sorbent delivery and let out arrangements directing the materials also washing zone above combustion zone. Burner is secure in center of dome-like casing and is provided with fuel gas nozzles and at least one nozzle for delivering waste gases directed vertically downwards into combustion zone. Gases appearing in process of burning are directed along inner side of outer tube form base upwards into washing zone. Possibility to let out sorbent after its distribution in washing zone and enrichment with reaction products, is provided along inner side of outer tube through base. EFFECT: reduced cost of manufacture, provision of reliable operation. 20 cl, 7 dwg
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