Bundle-guiding optical collector for collecting the emission of a radiation source

摘要

A bundle-guiding optical collector collects an emission of a radiation source and forms a radiation bundle from the collected emission. A reflective surface of the collector is the first bundle-forming surface downstream of the radiation source. The reflective surface is formed such that it converts the radiation source into a family of images in a downstream plane. The family of images includes a plurality of radiation source images which are offset to each other in two dimensions (x, y) in a direction perpendicular to the beam direction of the transformed radiation bundle and are arranged relative to each other in a non-rotationally symmetric manner relative to the beam direction of the transformed radiation bundle. The transformed radiation bundle in the downstream plane has a non-rotationally symmetric bundle edge contour relative to the beam direction of the transformed radiation bundle. The result is a collector in which the radiation bundle shape generated by the collector. In other words, the illumination distribution generated by the collector in a defined manner in the plane downstream of the collector has a shape which is freely selectable to the greatest possible extent.

主权项

1. An optical system having an illumination field, the optical system comprising:
a bundle-guiding optical collector configured to collect radiation emitted by a radiation source and to form a transformed radiation bundle from a collected source-side radiation bundle, the bundle-guiding optical collector comprising a reflective surface which is a first bundle-forming surface downstream of the radiation source; and a bundle-guiding optical element upstream of the illumination field along a path of the radiation through the optical system, wherein:
the reflective surface comprises a plurality of reflective facets that complement each other to provide a total reflector surface;at least some of the facets have aspheric reflector surfaces;the reflective surface is configured to convert the radiation into a family of images in a downstream plane;the family of images includes a plurality of radiation source images offset from each other in two dimensions relative to a beam direction of the transformed radiation bundle;the family of images is arranged relative to each other in a non-rotationally symmetric manner with respect to the beam direction of the transformed radiation bundle so that the transformed radiation bundle in the downstream plane has a non-rotationally symmetric bundle edge contour relative to the beam direction of the transformed radiation bundle; andthe bundle-guiding optical element is in the downstream plane.