| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact crystal device in which failure due to thermal history by heat generation of a heater is prevented. ! SOLUTION: A crystal device (100) includes a crystal vibration piece (110), a temperature sensor (142), a heater (141), an integrated circuit (143), a package (120) having a first recess (121) consisting of a bottom (120b) and a first side face (120a) and in which the crystal vibration piece and the heater are arranged, and a second recess (122) consisting of a bottom and a second side face (120c) formed to surround the other side of the bottom and in which the temperature sensor and the integrated circuit are arranged, and a lid plate (130) arranged on the upper surface of the package so as to seal the first recess and formed of a metallic material. On the lower surface of the package, an earth terminal (125a) to be connected electrically with the lid plate is formed, the lid plate is thermally connected with the heater, and the crystal vibration piece is heated b |
