Maintenance System, and Substrate Processing Device

摘要

The present disclosure provides a maintenance system, installed in a substrate processing device, is comprised of an equipment control unit, a sensor acquisition unit and determination unit and control signal generation unit. The equipment control unit operates the monitored equipment within the substrate processing device. The sensor acquisition unit and determination unit can detect when a person has entered the substrate processing device. The control signal generation unit outputs a signal to stop the monitored equipment when a person is detected within the substrate processing device.

主权项

1. A maintenance system installed in a substrate processing device, comprising:
an equipment control unit configured to operate monitored equipment located within the substrate processing device; a human presence detection unit configured to detect an entry of a person into the substrate processing device; and a control signal generation unit configured to output a signal to the equipment control unit for stopping the operation of the monitored equipment if the entry of the person into the substrate processing device is detected by the human presence detection unit.