METHOD FOR MANUFACTURING RUTHENIUM POWDER AND RUTHENIUM TARGET

摘要

The present invention relates to a method for manufacturing a ruthenium powder, the method comprises the steps of: S1) introducing a ruthenium raw material into a mold; S2) plasma-processing the introduced ruthenium raw material to form a first ruthenium powder; and S3) disposing the first ruthenium powder on a bed coated with ruthenium and jet mill-pulverizing the first ruthenium powder to form a second ruthenium powder.