| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic capacity variation detecting module capable of easily and reliably reducing air resistance, and a MEMS sensor using the module.SOLUTION: This invention is an electrostatic capacity variation detecting module constituting a MEMS sensor for detecting one physical quantity of angular velocity and acceleration and includes: one or more electrostatic capacity variation detecting units; and an elastic body connected to the one or more electrostatic capacity variation detecting units. The electrostatic capacity variation detecting unit includes: a movable electrode having a planar part; and a plurality of fixed electrodes which are disposed along the planar part of the movable electrode in parallel with each other and have planar parts disposed to face with intervals so as to form a capacitor with the planar part of the movable electrode. The elastic body supports so as to be able to move the planar part of the movable electrode in the facing direction to the planar parts of the fixed electrodes. It is preferable to set an average distance among the plurality of fixed electrodes to be 3-9 μm. |
