| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical element having an anti-reflection film which offers a wide adjustable range of hollow particle layer thickness, suppressed scattering, and superior anti-reflection property, and to provide optical systems and optical devices having the same.SOLUTION: An optical element is provided, having a substrate 10 and an anti-reflection film 11 laminated on the substrate. The anti-reflection film comprises, in order from the substrate side, a multilayer film layer 12 comprising a plurality of dielectric thin films, a hollow particle layer 6 made up of hollow particles 14 bonded together by a dielectric material, and a film thickness adjustment layer 7 which is laminated on top of the hollow particle layer and is made of a homogeneous dielectric material. The hollow particles have an average particle diameter of 60 nm or less, and a filling rate of the hollow particles in the hollow particle layer shall be no less than 65%. |
