Speckle Interferometric Method and System for Detecting a Movement of a Surface

摘要

A method and a system for detecting a movement of a surface on an irradiated sample involves a light source for irradiating the surface with a coherent light beam, a detector for detecting variations caused by the movement in a speckle pattern produced by reflections of the light beam at the surface, selecting a single speckle from the speckle pattern, and detecting the variations at the selected speckle.