发明名称 FUNCTIONAL INK, ELECTRIC MACHINE CONVERSION ELEMENT, DROPLET DISCHARGE HEAD, AND INKJET RECORDING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide functional ink to be used for forming an electro-mechanical conversion film of good quality.SOLUTION: A hydrophilic region is formed with a functional ink film 52. The functional ink film 52 is one to be used when an electro-mechanical conversion film is formed, and contains an auxiliary solvent different from the main solvent of the precursor sol-gel solution, and the ratio of a drying speed to the main solvent is 75% or less. The functional ink film 52 is subjected to a heat treatment so that a heat-treated functional ink film 53 is formed. By the heat treatment, a SAM film 50 is caused to disappear.
申请公布号 JP2015004087(A) 申请公布日期 2015.01.08
申请号 JP20130128723 申请日期 2013.06.19
申请人 RICOH CO LTD 发明人 SHIMOFUKU HIKARI;MACHIDA OSAMU;TAKEUCHI JUN;AKIYAMA ZENICHI;UEDA KEIJI
分类号 C23C26/00;B41J2/045;B41J2/055;F04B43/04;G02B26/08;G02B26/10;G11B21/10;G11B21/21;H01L21/8246;H01L27/105;H01L41/09;H01L41/113;H01L41/318 主分类号 C23C26/00
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