发明名称 |
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE |
摘要 |
<p>A method for manufacturing a semiconductor device, which comprises: a step (A) wherein a semiconductor chip is flip-chip bonded to a circuit formation surface of a semiconductor wafer; a step (B) wherein a package is formed by embedding the semiconductor chip, which has been flip-chip bonded to the semiconductor wafer, in an encapsulation sheet; a step (C) wherein the back surface of the semiconductor chip is exposed to the outside by grinding the encapsulation sheet of the package; and a step (D) wherein the package, from which the back surface of the semiconductor chip is exposed, is diced. This method for manufacturing a semiconductor device also comprises a step wherein the encapsulation sheet is subjected to laser marking after the step (B) and before the step (C) and/or after the step (C) and before the step (D).</p> |
申请公布号 |
WO2015002048(A1) |
申请公布日期 |
2015.01.08 |
申请号 |
WO2014JP66873 |
申请日期 |
2014.06.25 |
申请人 |
NITTO DENKO CORPORATION |
发明人 |
SHIGA, GOJI;MORITA, KOSUKE;IINO, CHIE;ISHIZAKA, TSUYOSHI |
分类号 |
H01L23/00;H01L21/301;H01L21/56;H01L23/28 |
主分类号 |
H01L23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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