发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <p>A method for manufacturing a semiconductor device, which comprises: a step (A) wherein a semiconductor chip is flip-chip bonded to a circuit formation surface of a semiconductor wafer; a step (B) wherein a package is formed by embedding the semiconductor chip, which has been flip-chip bonded to the semiconductor wafer, in an encapsulation sheet; a step (C) wherein the back surface of the semiconductor chip is exposed to the outside by grinding the encapsulation sheet of the package; and a step (D) wherein the package, from which the back surface of the semiconductor chip is exposed, is diced. This method for manufacturing a semiconductor device also comprises a step wherein the encapsulation sheet is subjected to laser marking after the step (B) and before the step (C) and/or after the step (C) and before the step (D).</p>
申请公布号 WO2015002048(A1) 申请公布日期 2015.01.08
申请号 WO2014JP66873 申请日期 2014.06.25
申请人 NITTO DENKO CORPORATION 发明人 SHIGA, GOJI;MORITA, KOSUKE;IINO, CHIE;ISHIZAKA, TSUYOSHI
分类号 H01L23/00;H01L21/301;H01L21/56;H01L23/28 主分类号 H01L23/00
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