| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of accurately measuring two pressures which are different in scale while achieving its downsizing. SOLUTION: The pressure sensor 20 includes a case 21, a first sensor chip 30 and a second sensor chip 40 housed in the case 21, each of which is composed of a silicon substrate. The first sensor chip 30 for detecting a comparatively small pressure (a first pressure) and the second sensor chip 40 whose pressure detection range is wider than that of the first sensor chip 30 for detecting a comparatively large pressure (a second pressure) are overlapped. A signal processing circuit 50 is integrated in the first sensor chip 30. COPYRIGHT: (C)2013,JPO&INPIT |
