| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing method/device including a draining process wherein a use amount of IPA (isopropyl alcohol) or a draining drying liquid taking the place thereof is little while sufficiently removing water. SOLUTION: This washing device 1 (washing method) includes: a first wash processing tank 2 and a second wash processing tank 3 (a chemical washing process) for applying a washing solvent to a washed object; a first rinse tank 4 and a second rinse tank 5 (a rinse process) for rinsing the washed object after wash processing with water; and a draining drying tank group 6 (a draining drying process) for removing the water attached to the washed object. Each of the draining drying tank group 6 includes: a hot pure water pulling-up tank 11 (a water pulling-up process) for pulling up the washed object after immersing it; and a solvent drying tank 13 (a solvent drying process) for applying vapor of a drying solvent taking in water. COPYRIGHT: (C)2012,JPO&INPIT |
