DEVICE FOR INTRODUCING REACTION GASES INTO A REACTION CHAMBER AND EPITAXIAL REACTOR WHICH USES SAID DEVICE

摘要

The present invention relates to a device (1) for introducing reaction gases into a reaction chamber of an epitaxial reactor; the device (1) comprises a gas supply pipe (2) and a cooling member (3) situated at one end of the supply pipe (2) and able to cool the supply pipe (2) and thereby the gas flowing inside it.