发明名称 |
CASSETTE APPARATUS, SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD |
摘要 |
<p>This cassette apparatus has a first unit section that performs substrate supply or substrate recovery, and a second unit section that performs the substrate supply or the substrate recovery, which is not performed by the first unit section. The first unit section and the second unit section can be brought close to each other or separated from each other.</p> |
申请公布号 |
KR20150002647(A) |
申请公布日期 |
2015.01.07 |
申请号 |
KR20147028039 |
申请日期 |
2012.12.17 |
申请人 |
NIKON CORPORATION |
发明人 |
HAMADA TOMOHIDE;SUZUKI TOMONARI |
分类号 |
H01L21/677;B65H23/04;H01L21/673 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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