发明名称 PROCEDE DE FABRICATION D'UN SUBSTRAT ET STRUCTURE SEMICONDUCTEUR
摘要 The invention relates to a method for fabricating a substrate, comprising the steps of providing a donor substrate with at least one free surface, performing an ion implantation at a predetermined depth of the donor substrate to form an in-depth predetermined splitting area inside the donor substrate, and is characterized in providing a layer of an adhesive, in particular an adhesive paste, over the at least one free surface of the donor substrate. The invention further relates to a semiconductor structure comprising a semiconductor layer, and a layer of a ceramic-based and/or a graphite-based and/or a metal-based adhesive provided on one main side of the semiconductor layer.
申请公布号 FR2985601(B1) 申请公布日期 2016.06.03
申请号 FR20120050162 申请日期 2012.01.06
申请人 SOITEC 发明人 KONONCHUK OLEG
分类号 H01L21/02;H01L21/762;H01L27/00 主分类号 H01L21/02
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